据使用者描述，一台2003年购进的扩展型等离子清洗机在清洗约20nm厚的聚合物运行40分钟后，一股白色烟气从反应舱冒出；该气体非常刺激且有毒。
首先确认白色烟气是从反应舱而非从等离子清洗机本身窜出。如果等离子清洗处于开机状态、真空泵关闭、反应舱开启、舱内无样本时，白色氧气是从等离子清洗机机箱内出来的吗？如果是的话，这说明有电子故障及可能有电子部件烧毁。如果不是，我们猜测是其它问题。
You have not specified what process gas your customer is using. What is this and could this be contributing to the smoke issue? Assuming the electronics are not suspect, if the plasma cleaner is run under vacuum but without the sample in the chamber, does the smoke still appear? It may still do so due to possible contamination buildup on the inside of the chamber and door, which may need to be removed with isopropyl alcohol or a similar cleaner.
使用者未说明处理气体是什么。该种气体可能导致白烟的产生？假如电子部件完好，如果开启清洗机及真空泵，而样本未放入舱内还有白烟出现吗？如果还冒白烟的话，可能是沉积在反应舱和舱门内壁的污物，这些污物需要用异丙醇或类似去污剂去除。
Finally, if the unit is operating under vacuum in order to form plasma, with the vacuum pump in operation, any gas or contaminant in the chamber should be swept through the chamber and vacuum hose and out the pump exhaust by virtue of the pumping action and any smoke should only be seen at the pump exhaust and not around the plasma cleaner itself. If you do see a white colored smoke near the pump exhaust, this could possibly be oil mist from the pump and have nothing to do with the plasma cleaner itself; this could be corrected with a suitable oil mist filter for the pump in question.
如果等离子清洗机在真空状态下运转，而产生等离子，任何的气体或污物应该席卷反应舱；真空管，真空排气口处有由于抽气而产生的烟气吗？而不是等离子清洗机本身？如果看见真空泵排气口处有白色烟气，这可能是从泵里面排除的油雾，与等离子清洗机本身没任何关系；这个问题可以通过更换适当的油雾过滤器来解决。
本博客版权归 迈可诺等离子技术小组 所有，未经同意不得转载。
