Q: Is the Cleaner able to form oxygen plasma? Under this conditon, is it possible to produce hydroxyl or carboxyl on the surface of oxide? Is the gas applied oxygen or ozone?
等离子清洗机能产生氧气等离子体吗？在这种情况下，能在氧化物表面产生羟基或羧基吗？处理气体是氧气还是臭氧？
A: The plasma cleaner can form an oxygen plasma. The oxygen plasma can introduce hydroxyl groups on the surface of materials. You would use oxygen process gas to form the oxygen plasma. Some ozone is actually produced when the plasma is generated, but the predominant reactive species in the plasma is atomic oxygen and ionized oxygen.
等离子清洗机能产生氧气等离子体。氧气等离子体能在材料表面产生羟基。你需要使用氧气作为处理气体来产生氧气等离子体。实际上等离子体产生的时候，一些臭氧也产生了，但是等离子体中的主要活性粒子为原子氧及离子化氧。
Another type of gas may be required to introduce carboxyl groups on the surface. What is the oxide material to be plasma treated? I may be able to find more information about your intended application through some literature review.
其它类型的气体可能需要用来在样本表面产生羟基，这个要看等离子处理的具体氧化物是什么。
本博客版权归 迈可诺等离子技术小组 所有，未经同意不得转载。
